Activation of Al2O3 surface passivation of silicon: Separating bulk and surface effects

Grant NE, Pain SL, Khorani E, Jefferies R, Wratten A, McNab S, Walker D, Han Y, Beanland R, Bonilla RS, Murphy JD
February 2024
Journal article
Journal:
Applied Surface Science
Volume:
645
,
Elsevier
,
pp.
158786 - 158786
No abstract available
DOI
10.1016/j.apsusc.2023.158786
ORA record